전자재료용 고순도가스
Product Name
High-purity
CF4
C2F6
CHF3
CH2F2
CH3F
C3F8
C4F8
C4F6
C2HF5
SF6
HF
HBr
High-purity
HCl
Cl2
BCl3
NH3
N2O
NF3
SiF4
CO2
20% F2 / N2
5% Cl2 / N2
H2Se
H2S